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Product
ITO-Coated-Glass-Substrate28

Al2O3 single crystal substrate, <0001> 2" Dia. x 0.43mm 2sp

Features:

  • Sapphire ( single crystal of Al2O3 ) is being used extensively as a substrate for III-V nitrides and for many other epitaxial films 
  • Orientation: C-plane off 0.2+/- 0.1o to M-plane leftwards from the Primary; 0 +/- 0.1o off to A-plane
  • Diameter: 50.8mm+/-0.1mm
  • Thickness: 430um+/-15 um
  • Major Flat: A-axis[11-20]+/-0.3o
  • Major Flat Length: 16mm +/- 1mm
  • Surface Finish: Front side: Epi- polished; Back side: Epi- polished 
  • Bow=10 um, TTV: <= 10um, Micro-roughness
  • Package: Each wafer is packed in 1000 class clean room 

Typical Properties:

  • Crystal Structure: Hexagonal. a=4.758 Angstroms c=12.99 Angstroms
  • Melting Point: 2040 degree C
  • Density: 3.97 gram/cm2 
  • Growth Technique: CZ
  • Crystal Purity:  >99.99%
  • Hardness: 9 ( mohs)
  • Thermal Expansion: 7.5x10-6 (oC)
  • Thermal Conductivity: 46.06 @ 0 oC, 25.12 @ 100 oC, 12.56 @ 400 oC ( W/(m.K) ) 
  • Dielectric Constant: ~ 9.4 @300K  at A axis ~ 11.58@ 300K at C axis
  • Loss Tangent at 10 GHz: < 2x10-5  at A axis,  <5 x10-5  at C axis

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