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ITO-Coated-Glass-Substrate22

Al2O3- Sapphire Wafer, C-plane (0001), 3" Dia.x0.43mm , 2SP

Features:

  • Sapphire (single crystal of Al2O3 ) is being used extensively as a substrate for III-V nitrides and for many other epitaxial films 
  • Orientation: C-axis[0001]( +/-0.3 Deg) with Standard Flat
  • Diameter: 3" +/- 0.3mm
  • Thickness: 430um +/- 25 um
  • Major Flat: A-axis[11-20]+/-0.5o
  • Surface Finish: Front sides: Epi- polished Ra<0.5nm (by AFM)
  • Back side: Epi- polished , <0.5nm(by AFM)
  • TTV: < =15um
  • BOW: <=15um
  • WARP: <=15um
  • Polished surface: Two side epi polished by special CMP technology
  • Package: Each wafer is packed in 1000 class clean room  

Typical Properties:

  • Crystal Structure: Hexagonal. a=4.758 Angstroms c=12.99 Angstroms
  • Melting Point: 2040 degree C
  • Density: 3.97 gram/cm2 
  • Growth Technique: CZ
  • Crystal Purity:  >99.99%
  • Hardness: 9 ( mohs)
  • Thermal Expansion: 7.5x10-6 (oC)
  • Thermal Conductivity: 46.06 @ 0 oC, 25.12 @ 100 oC, 12.56 @ 400 oC ( W/(m.K) ) 
  • Dielectric Constant: ~ 9.4 @300K  at A axis ~ 11.58@ 300K at C axis
  • Loss Tangent at 10 GHz: < 2x10-5  at A axis,  <5 x10-5  at C axis

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